Development and characterization of high voltage CMOS particle pixel sensor with integrating electronics

H. Mateos, F. Ehrler, R. Schimassek, S. Scherl,N. Striebig,I. Peric

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment（2023）

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摘要

We present a High Voltage (HV) CMOS particle pixel sensor with pixel electronics based on a high dynamic range integrator. The application is beam monitoring at an ion beam therapy facility. The test sensor chip has been implemented in an180 nm HV-CMOS technology with a high resistivity substrate. Readout electronics are implemented on-chip and sensing elements formed by n in p substrate. Beam test and lab measurements are presented.

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关键词

HV-CMOS sensor,Monolithic Active Pixel Sensor (MAPS),Integrating pixel electronics,Ion beam therapy,Proton beam therapy

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