On-Wafer Characterization and Modelling of InP Resonant Tunnelling Diodes up to 500 GHz

2022 52nd European Microwave Conference (EuMC)(2022)

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摘要
This work reports the development of a multiline TRL calibration kit for submillimetre characterization of InP resonant tunnelling diodes (RTDs). Successful device S-parameter calibration, measurements, and de-embedding are reported in three different bands, and up to 500 GHz. A novel (for RTDs) technique for estimating the device's vertical structure parasitic elements based on measurements of semiconductor structures without active layers is proposed. An approach toward large-signal modelling of the RTD based on a symbolically defined component (SDD) has been implemented and successfully verified against measurements up to 500 GHz.
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关键词
InP,THz,RTD,TB-RTD,On-wafer measurements,RF characterization,mTRL,device modelling
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