Development of a High-Performance Cutting Device Based on Hybrid Actuation for Ultra-Precision Machining

In ultra-precision cutting, the inherent working frequency and positioning accuracy of actuators are decisive. It is challenging to generate multi-scale cutting motions with high accuracy on hierarchical scale simultaneously. In this study, a novel micro and nano-cutting device with complex-axis is developed, consisting of a customized designed linear voice coil motor and a piezoelectric actuated flexure-hinge mechanism to generate micro and nano-cutting motions, respectively, for overcoming the challenge. The structure of the cutting device is designed with a small form factor in dimension in comparison to other auxiliary cutting devices for ultra-precision machine tools. The magnetic field simulation is also used to optimize the output force of the voice coil motor with the simulation results validated by experiments using a force sensor. The operation mechanism of the flexure-hinge is investigated by finite element analysis. The device can perform ± 0.5 mm stroke at 10 Hz and ± 8 µm at 3300 Hz for generation of microstructures with experimental validation. The significance and originality of this study lie in the successful development of a novel hybrid actuation cutting system that can generate multi-scale cutting motions with high accuracy and flexibility on a hierarchical scale for the generation of microstructured surfaces in ultraprecision machining.