Characterizing optical phase-change materials with spectroscopic ellipsometry and polarimetry

Yael Gutiérrez,Shirly Espinoza, Martin Zahradník,Krishna Khakurel, Josef Resl,Christoph Cobet,Kurt Hingerl,Matthias Duwe,Peter Thiesen,Maria Losurdo

Thin Solid Films（2022）

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摘要

•Spectroscopic ellipsometry (SE) is a key technique for the characterization of PCMs.•Imaging SE allows the characterization of µm-size PCM patches in photonic devices.•Ultrafast fs pump-probe SE is useful for understanding the speed of the optical properties modulations.•Temperature dependent dynamic ellipsometry can be used to stablish Tc.•Imaging polarimetry can resolve local anisotropies after the crystallization process.

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关键词

Ellipsometry,Polarimetry,Phase-change materials

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