Selectively enhanced microarea crystal growth of ZnO nano-and microwires on GaN on sapphire substrates by mist chemical vapor deposition

JOURNAL OF THE CERAMIC SOCIETY OF JAPAN(2022)

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摘要
The selectively enhanced micro area crystal growth of ZnO nano-and microwires on GaN on sapphire sub-strates by mist chemical vapor deposition (mist-CVD) was demonstrated. Micropatterns of a thin Au layer were formed on the surface of a GaN crystal by a simple technique. ZnO nano-and microwires with high crystal growth rates were grown on the micropatterned thin Au layer, resulting in selectively enhanced microarea crys-tal growth. The lengths of some ZnO nano-and microwires were more than 15 over bar m for 30 min crystal growth. (c) 2022 The Ceramic Society of Japan. All rights reserved.
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关键词
ZnO nano and microwires, Mist-CVD, Micro-area crystal growth
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