Characterization of two-photon-polymerization lithography structures via Raman spectroscopy and nanoindentation

JOURNAL OF OPTICAL MICROSYSTEMS(2022)

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摘要
Additive manufacturing using two-photon polymerization (TPP) lithography is increasingly used in industry and research. Parameter sweeps of cuboid structures fabricated using TPP lithography were investigated across the parameters of the laser power and scan speed to find dependent mechanical material properties. The employed photoresists were examined using Raman spectroscopy to find the degree of conversion (DC) of monomer to polymer, and subsequently, micro- or nanoindentation was used to find Young's modulus (E). For the photo-resist IP-Dip, the attained DC and E ranged from 20% to 45% and 1 to 2.1 GPa, respectively. The results were compared with reports found in the literature. For IP-Q, the attained DC and E ranged from 53% to 80% and 0.5 to 1.3 GPa, respectively. The characterized properties of IP-Q manifest as the current state of knowledge of the material. (C) The Authors. Published by SPIE under a Creative Commons Attribution 4.0 International License.
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关键词
two-photon polymerization, Raman spectroscopy, nanoindentation
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