Flexible Solar-Blind Photodetectors Based on β-GaO Films Transferred by a Stamp-Based Printing Technique
IEEE Electron Device Letters(2022)
摘要
A stamp-based printing technique was applied to transfer the
$\beta $
-Ga
$_{{2}}\text{O}_{{3}}$
films grown by pulsed laser deposition (PLD) from Si substrates onto some flexible substrates, such as PET, PEN, and PI. It is demonstrated that the
$\beta $
-Ga
$_{{2}}\text{O}_{{3}}$
-based flexible solar-blind photodetectors (SBPDs) exhibit brilliant optoelectrical performances with a low dark current of 1.7pA at 10V, a
$\text{I}_{ {254} \text {nm}}/\text{I}_{ \text {dark}}$
ratio of
${1.2} \times {10}^{{3}}$
, rise (
$\tau _{r\,{1}}$
=0.079s and
$\tau _{r\,{2}}$
=0.413s) and decay (
$\tau _{d\,{1}}$
=0.029s and
$\tau _{d\,{2}}$
=0.316s) times. In a further step, flexible imaging sensor arrays based on the
$\beta $
-Ga
$_{{2}}\text{O}_{{3}}$
/PET were fabricated, which exhibit good imaging capability and resolution. Moreover, wearable UVC-alarms based on the
$\beta $
-Ga
$_{{2}}\text{O}_{{3}}$
/PET were realized to monitor the UVC radiation in the environment in real time, which can be used in the COVID-19-related area.
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关键词
β-Ga₂O₃ films,pulsed laser deposition,stamp-based printing technique,flexible solar-blind photodetectors
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