G-band Silicon-filled Waveguide Slot Antenna Array for Highly Integrated Application

In this paper, a G-band silicon-filled waveguide slot antenna array for highly integrated application is presented. The sidewalls are enclosed in gold-metal from all sides. The electromagnetic waves are radiated by slots etched on the top surface of the silicon. The slot array is distributed with unequal spacing to reduce the side lobes level. In addition, considering the fabrication and integrate with terahertz chips, a coplanar waveguide (CPW) to silicon-filled waveguide transition structure is designed. Simulated results demonstrate that a 1x8 slot array displays very lower side lobe levels, and with the gain of 6 dBi at the frequency of 206.4 GHz. The silicon-based waveguide enables highly integrated terahertz system, since it allows for downscaling the waveguide's cross section by a factor of about 2.3, compared to an air-filled waveguide.