Active platform stabilization with a 6D seismometer

We demonstrate the control scheme of an active platform with a six degree of freedom (6D) seismometer. The inertial sensor simultaneously measures translational and tilt degrees of freedom of the platform and does not require any additional sensors for the stabilization. We show that a feedforward cancelation scheme can efficiently decouple tilt-to-horizontal coupling of the seismometer in the digital control scheme. We stabilize the platform in the frequency band from 250 mHz up to 10 Hz in the translational (X, Y) degrees of freedom and achieve a suppression factor of 100 around 1 Hz. Further suppression of ground vibrations was limited by the non-linear response of the piezo actuators of the platform and by its limited range ( 5 mu m). In this paper, we discuss the 6D seismometer, its control scheme, and the limitations of the test bed.