Improving Minimum Feature Sizes of Subwavelength Grating Slot Waveguide Optical Sensors

Can Ozcan,J. Stewart Aitchison,Mo Mojahedi

2022 IEEE Photonics Conference (IPC)（2022）

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摘要

We show that the minimum feature size of subwavelength grating slot waveguides can be increased from 60 nm to 120 nm with enhanced fabrication tolerance and only 13 nm/RIU reduction in the bulk sensitivity from 538 nm/RIU to 525 nm/RIU.

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关键词

optical sensors,subwavelength gratings,bulk sensitivity,Monte Carlo analysis

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