Research on Vibration Amplitude of Ultra-Precision Aerostatic Motorized Spindle under the Combined Action of Rotor Unbalance and Hydrodynamic Effect.

In the working process of the gas bearings, the unbalanced force of the rotor will increase nonlinearly with the increase in the rotating speed, resulting in an increase in the rotor's vibration amplitude. On the other hand, with the increase in the rotating speed, the hydrodynamic effect will increase, and the nonlinear increase in the gas film force and stiffness will inhibit the increase in the vibration amplitude. In order to deeply study the influence of the unbalanced force and nonlinear gas film force on the vibration amplitude of the ultra-precision aerostatic motorized spindle, taking the double slit throttling gas bearing as an example, according to the equilibrium equation of the rotor under the combined action of gravity, the gas film force, and the unbalanced force, a calculation program based on the finite difference method for solving the rotor's equilibrium position is completed. The calculation results show that: the hydrodynamic effect can significantly increase the bearing capacity and cause the change of the static equilibrium position of the rotor, but the offset amplitude of the static equilibrium position of the rotor gradually slows down with the increase in the rotating speed. The hydrodynamic effect improves the stiffness near the static equilibrium position of the rotor, making the rotor vibration track tend to be more "round". Although the unbalanced force of the rotor increases nonlinearly as the rotating speed increases, the maximum offset between the dynamic equilibrium position and the static equilibrium position of the rotor under the action of the rotating unbalanced force is approximately linear with the rotating speed. Compared with the air supply pressure, the rotor unbalance and rotating speed are the main factors affecting the rotor dynamic equilibrium position offset. This study has a reference role in the in-depth study of the influence of rotating speed and rotor unbalance on the rotor static equilibrium position and dynamic equilibrium position offset, as well as in the design of gas bearings and the prediction of rotor vibration amplitude.