A Polarization-Independent Zig-Zag-Tilted Ovals Grating Coupler in a 0.25 µm Photonic BiCMOS Technology

Galina Georgieva,Pascal M. Seiler,Christian Mai,Anna Peczek,Klaus Petermann,Lars Zimmermann

2022 European Conference on Optical Communication (ECOC)（2022）

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摘要

A polarization-independent grating coupler, optimized for a low in-plane scattering and PDL is presented. It comprises an array of ovals with zig-zag orientations and is compatible with a 0.25 µm photonic BiCMOS technology. The wafer-averaged maximal PDL within a 20 nm bandwidth is 0.5 dB.

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