Nanochip: a MEMS-Based Ultra-High Data Density Memory Device

Nickolai BELOV,Donald ADAMS,Тsung-Kuan CHOU,John HECK,Byong KIM,Gordon KNIGHT,Qing MA,Valluri RAO,Jong-Seung PARK,Robert STARK,Ghassan TCHELEPI

Sensors & Transducers（2009）

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摘要

he paper provides an overview of successful development of MEMS micro-mover with large range of motion and an array of cantilevers with sharp tips (read-write heads) for a probe storage device. Approaches used for integration of memory material into the MEMS process and integration of MEMS cantilever process with CMOS are briefly discussed.

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关键词

Probe storage,CMOS-MEMS integration,Micro-mover,Cantilevers,Electromagnetic actuator,Electrostatic actuator

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