The effect of interdiffusion during formation of epitaxial Ca intercalated layered silicene film on its thermoelectric power factor

Deformation of silicene buckled structure attracts great interest for the possibility of ultrahigh thermoelectric power factor. Therefore, the control method of silicene buckled structure is needed. Here, we developed the method to control composition ratio in epitaxial Ca intercalated layered silicene (CaSi2) film formed by solid phase epitaxy through an atomic interdiffusion between Ca films and Si substrate because of the possible existence of the relation between silicene buckled structure in CaSi2 film and the composition ratio. The interdiffusion is controlled by introducing hydrogen-terminated layer as an interface layer between Ca and Si substrate, resulting in the control of the composition ratio in CaSi2 film. Moreover, we find that the CaSi2 films with different composition ratio exhibit different thermoelectric power factors. This study reveals that introducing the interface layer for interdiffusion control is an effective way to control the composition ratio and to form metastable high-buckled silicene with high power factor.