Obtaining of Carbon Nanowalls with A Specified Morphology

2022 International Symposium on Semiconductor Manufacturing (ISSM)(2022)

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摘要
This work presents experimental results on the synthesis of carbon nanowalls (CNWs) with predefined morphology on the surface of nanoporous alumina membrane using method of radio-frequency plasma-enhanced chemical vapor deposition. Obtained samples were characterized by the methods of scanning electron microscopy and Raman spectroscopy. From the microstructure analyses of CNWs, it has been observed that there is a time dependence of the reproducibility of membrane morphology by CNWs. At the early stage of CNWs growth, CNWs grow preferably around the edges of nanopores and continue to grow vertically with time. Nanopores size begin to shrink drastically and pores are completely covered by secondary flake-like CNWs after 25 minutes of growth.
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关键词
carbon nanowalls,radio frequency plasma enhanced chemical vapor deposition,capacitively coupled plasma,nanoporous alumina membrane
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