High-sensitivity MEMS force and acceleration sensor based on graphene-induced non-radiative transition

The micro-electromechanical-system (MEMS) force and acceleration sensor, based on the graphene-induced non-radiative transition, was investigated using analytical solution and finite element analysis methods. The graphene-induced non-radiative transition is highly sensitive to distance, and the deflection of the graphene ribbon is highly susceptible to applied force or acceleration. As a result, a high-sensitivity MEMS sensor was designed to detect the deflection of the graphene ribbon of 1 nm, the force of 0.1 pN, and the acceleration of 0.1 mg. The MEMS sensor, which has a size of only tens of microns, can be charged by light irradiation without connecting power sources. The generated signal can be detected from a long distance without an integrated radio reflection circuit. Therefore, it will have significant application prospects in the fields of micro-smart devices, wearable devices, biomedical systems, and so on.