MOSFET Physics-Based Compact Model Mass-Produced: An Artificial Neural Network Approach.

The continued scaling-down of nanoscale semiconductor devices has made it very challenging to obtain analytic surface potential solutions from complex equations in physics, which is the fundamental purpose of the MOSFET compact model. In this work, we proposed a general framework to automatically derive analytical solutions for surface potential in MOSFET, by leveraging the universal approximation power of deep neural networks. Our framework incorporated a physical-relation-neural-network (PRNN) to learn side-by-side from a general-purpose numerical simulator in handling complex equations of mathematical physics, and then instilled the "knowledge'' from the simulation data into the neural network, so as to generate an accurate closed-form mapping between device parameters and surface potential. Inherently, the surface potential was able to reflect the numerical solution of a two-dimensional (2D) Poisson equation, surpassing the limits of traditional 1D Poisson equation solutions, thus better illustrating the physical characteristics of scaling devices. We obtained promising results in inferring the analytic surface potential of MOSFET, and in applying the derived potential function to the building of 130 nm MOSFET compact models and circuit simulation. Such an efficient framework with accurate prediction of device performances demonstrates its potential in device optimization and circuit design.