A Pipette Tip Integrated with a Capacitive Microsensor Fabricated by Combined 3D Printing and MEMS Process for Cell Detection and Transportation
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)(2023)
摘要
This paper reports on the detection and manipulation of cells using a pipette tip with a capacitive microsensor fabricated by combined 3D printing and MEMS processes. This pipette tip with microsensor was fabricated by 3D printing directly onto a MEMS device. First, a pair of comb electrode capacitive sensor was fabricated using the traditional MEMS process. Then, the pipette tip structure was 3D-printed directly on the sensor substrate by projection micro stereolithography. This process is possible to form nm- to cm-scale structures integrally with high precision and three-dimensionally. The fabricated device successfully detected cell suction and ejection. In addition, cell transfer was performed to show the possibility of applying the device to cell manipulation by a robot.
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关键词
Capacitive microsensor,3D printing,Cell Detection
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