Intersectional nanofabrication of disk nanoantennas by colloidal lithography

Optical nanoantennas, made of metallic or dielectric materials, have seen a rapid development for their remarkable optical properties facilitating the coupling of electromagnetic waves with subwavelength entities. However, highthroughput and cost-effective fabrication of these nanoantennas is still a daunting challenge. Here we provide a versatile nanofabrication method capable of producing large scale disk-shaped optical nanoantennas. It is developed from colloidal lithography with no dry etching required. Furthermore, both metallic and all-dielectric nanodisks can be readily fabrication in a high-throughput fashion. We believe that this nanofabrication method could find a wide range of applications with the diverse optical nanoantennas it can engineer.