Developing Quantitative Nondestructive Characterization of Nanomaterials: A Case Study on Sequential Infiltration Synthesis of Block Copolymers

ACS APPLIED POLYMER MATERIALS(2023)

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摘要
The sequential infiltration synthesis (SIS) of inorganic materials in nanostructured block copolymer templates has rapidly progressed in the last few years to develop functional nanomaterials with controllable properties. To assist this rapid evolution, expanding the capabilities of nondestructive methods for quantitative characterization of the materials properties is required. In this paper, we characterize the SIS process on three model polymers with different infiltration profiles through ex situ quantification by reference-free grazing incidence X-ray fluores-cence. More qualitative depth distribution results were validated by means of X-ray photoelectron spectroscopy and scanning trans-mission electron microscopy combined with energy-dispersive X-ray spectroscopy.
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关键词
block copolymers,PS-b-PMMA,self-assembly,sequential infiltration synthesis,reference-free grazing incidence X-ray fluorescence,metrology
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