Structural and Optoelectronic Characteristics of Β-Ga2o3 Epitaxial Films with Zn Alloying and Subsequent Oxygen Annealing

Xuan Sun,Kewei Liu,Xing Chen,Qichao Hou,Zhen Cheng,Jialin Yang,Qiu Ai,Yongxue Zhu,Binghui Li,Lei Liu,Dezhen Shen

Journal of materials chemistry C（2023）

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摘要

In this article, we have reported the fabrication of ∼7.5 at% Zn alloyed β-Ga2O3 epitaxial films and their high performance solar-blind photodetectors.

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