Fabrication of wafer-scale ordered micro/nanostructures for SERS substrates using rotational symmetry cantilever-based probe lithography

Lei Wu, Yewei Ren,Huaicheng Zhou,Yu Lin,Renxing Liu,Linmao Qian,Bingjun Yu

Applied Surface Science（2023）

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摘要

This study proposed a double-layer rotational symmetry cantilever (DRSC)-based probe lithography was proposed to fabricate wafer-scale order micro/nanostructures towards high-performance SERS substrates.

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关键词

sers substrates,micro/nanostructures,fabrication,wafer-scale,cantilever-based

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