High-Speed 1030 nm Anti-Waveguide VCSELs With 25 GHz Modulation Bandwidth

We present the design, fabrication, and performance of high-speed oxide-confined 1030 nm vertical-cavity surface-emitting lasers (VCSELs) with a short anti–waveguiding optical cavity. By using a half-wavelength cavity to enhance the limit of the optical field, the anti-waveguide design increases the oscillator strength, thus promoting high-speed modulation. We carefully optimized the multiple quantum wells and the doping profile in order to achieve high-speed operation. The developed VCSELs exhibit a modulation bandwidth exceeding 25.1 GHz at 25 °C, supporting back-to-back data rates up to 40 Gb/s under binary non-return-to-zero (NRZ) modulation.