Efficient Quadrature Suppression for Improved Performance of a MEMS Vibratory Gyroscope

Within this paper we report on a new efficient shape of comb electrodes for the use in DC quadrature compensation. With the help of finite element (FE) simulations, we support the thesis about one very important technological reason of the quadrature error in MEMS gyroscopes. Vibrometer measurements with the Polytec MSA-100-3D at working MEMS gyroscopes with and without quadrature compensation help to understand the mechanism. With the quadrature suppression, we see a large improvement of the noise performance of the MEMS vibratory gyroscope sensor reaching a bias instability below $\boldsymbol{0.04^{\circ}/\mathrm{h}}$ and an angle random walk down to $0.01^{\circ}/\surd\mathrm{h}$ .