Low frequency inertial sensing

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)(2023)

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摘要
We present an optomechanical inertial sensor for low frequency applications. This accelerometer is readout optically instead of capacitively, limiting electrostatic noise in the system. It consists of a 5 Hz monolithic fused-silica resonator with an oscillating test mass and a heterodyne interferometer readout. It is designed to be a compact, portable, and cost-effective alternative for highly sensitive inertial sensors at low frequencies. Potential applications include but are not limited to gravimetry, geodesy, and hydrology. The resonator has a measured mechanical quality factor (Q) of 477,000 and an mQ-product of 1200 kg. This high Q factor reduces thermal motion, allowing for a device with a competitive acceleration noise floor.
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关键词
accelerometer,seismometer,gravimeter,inertial sensing,interferometry,resonator
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