Application of the Improved Grinding Technology to Freeform Surface Manufacturing

PHOTONICS(2023)

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摘要
In order to meet the manufacturing requirements of modern space remote sensors for high-precision freeform optical parts, the grinding technology and its application were studied. The objective of this paper was to improve the application effect of traditional grinding technology in the processing of hard and brittle materials, and then apply it in specific fields. Therefore, the influence of key process factors such as cutting speed and removal depth on subsurface damage (SSD) was studied based on orthogonal experiments, and an improved grinding technology characterized by low SSD and high surface shape accuracy was formed. Then, the effect of this grinding technology was further verified by the high-precision manufacturing of freeform surfaces. A surface of a 130 mm diameter freeform surface was machined by improved grinding technology and combined polishing technology, the final root mean square of surface shape reached 12.1 nm. The improved grinding technology can reduce SSD from 20 mu m to 10 mu m, and improve the manufacturing efficiency of freeform surfaces above 30% when the cut speed is 20 m/s and the remove depth is 10 mu m. The proposed technology can be applied to the extreme manufacturing of hard and brittle materials.
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关键词
improved grinding technology,surface
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