Preparation, morphology and luminescence properties of micro-columnar structured Lu2O3:Eu films by LCVD method on quartz glass

Micron/sub-micron hard X-ray imaging is an important development direction of X-ray detection technology. Scintillation screens with excellent X-ray stopping power and high light output are desired to obtain good im-aging quality. Europium-doped lutetium oxide (Lu2O3:Eu) film with micro-columnar structure is an ideal candidate for this application. In this study, micro-columnar structured Lu2O3:Eu films were prepared on quartz glass substrates by laser chemical vapor deposition (LCVD) method. The influences of preparation conditions on structure and morphology properties of films were investigated by X-ray diffraction (XRD) and scanning electron microscopy (SEM). Photoluminescence and scintillation properties of the films, including photoluminescence excitation (PLE), photoluminescence (PL), PL decay, X-ray excitation luminescence (XEL), and afterglow curves, were recorded. The relationships between structure, morphology, luminescence properties of films, and prepa-ration conditions were investigated and discussed as well. The preparation conditions include laser power, ox-ygen flow rate, and precursor evaporation temperature. In addition, dual-layer Lu2O3:Eu film was prepared for the first time by just turning off the laser.