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Features of Surface Structuring of Direct and Indirect Band Gap Semiconductors by Femtosecond Laser

Nanooptics and Photonics, Nanochemistry and Nanobiotechnology, and Their Applications (2023)

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摘要
The impact of femtosecond (fs) laser radiation on semiconductors with direct (ZnSe, GaAs, CdZnTe) band gap, with the structurally induced direct-to-indirect band gap transition (PbI2, GaSe) and indirect band gap (Si) has been studied. The fs-laser treatment of semiconductors has been performed in the multi-pulse regime in air environment. The influence of fs-laser radiation parameters on surface morphology of the semiconductors has been analyzed by scanning electron microscopy (SEM) and 2D Fourier transform of SEM images, optical photoluminescence spectroscopy. Under the treatment with the fundamental fs-laser radiation (800 nm, about 130–150 fs), both low spatial frequency LIPSS and high spatial frequency LIPSS have been observed. Specific features of LIPSS of two types (low spatial frequency LIPSS and high spatial frequency LIPSS) and other structure peculiarities (grooves, grains, different defects in periodic structure, i.e., loops, strip breaks, and ablation products) have been also analyzed. The formation mechanisms of LIPSS are also considered within the scope of two approaches, namely an electromagnetic approach and matter reorganization processes.
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关键词
Semiconductor, Laser-induced periodic surface structures (LIPSS), Band gap
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