MOEMS Fabry-Pérot interferometers with ALD TiO2 anti-stiction coating for pull-in failure prevention

Smart Photonic and Optoelectronic Integrated Circuits 2023(2023)

引用 0|浏览0
暂无评分
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要