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Millimeter-wave to Near-Terahertz Sensors Based on Reversible Insulator-to-metal Transition in VO2

Communications materials(2023)

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摘要
In the quest for low power bio-inspired spiking sensors, functional oxides like vanadium dioxide are expected to enable future energy efficient sensing. Here, we report uncooled millimeter-wave spiking detectors based on the sensitivity of insulator-to-metal transition threshold voltage to the incident wave. The detection concept is demonstrated through actuation of biased VO 2 switches encapsulated in a pair of coupled antennas by interrupting coplanar waveguides for broadband measurements, on silicon substrates. Ultimately, we propose an electromagnetic-wave-sensitive voltage-controlled spike generator based on VO 2 switches in an astable spiking circuit. The fabricated sensors show responsivities of around 66.3 MHz.W −1 at 1 μW, with a low noise equivalent power of 5 nW.Hz −0.5 at room temperature, for a footprint of 2.5 × 10 −5 mm 2 . The responsivity in static characterizations is 76 kV.W −1 . Based on experimental statistical data measured on robust fabricated devices, we discuss stochastic behavior and noise limits of VO 2 -based spiking sensors applicable for wave power sensing in mm-wave and sub-terahertz range.
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关键词
Electrical and electronic engineering,Sensors and biosensors,Materials Science,general
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