Niobium quantum interference microwave circuits with monolithic three-dimensional nanobridge junctions

Nonlinear microwave circuits are key elements for many groundbreaking research directions and technologies, such as quantum computation and quantum sensing. The majority of microwave circuits with Josephson nonlinearities to date are based on aluminum thin films; therefore, they are severely restricted in their operation range regarding temperatures and external magnetic fields. Here, we present the realization of superconducting niobium microwave resonators with integrated, three-dimensional (3D) nanobridgebased superconducting quantum interference devices. The 3D nanobridges (constriction weak links) are monolithically patterned into prefabricated microwave LC circuits using neon focused -ion -beam milling, and the resulting quantum interference circuits show frequency tunabilities, flux responsivities, and Kerr nonlinearities on par with comparable aluminum nanobridge devices, but with the perspective of a much larger operation parameter regime. Our results demonstrate that neon focused -ion -beam milling is a promising method for fabricating 3D constriction junctions with flexible parameters and reveal great potential for application of the resulting microwave circuits in hybrid systems with, e.g., magnons and spin ensembles or in flux -mediated optomechanics.