Valence electron concentration- and N vacancy-induced elasticity in cubic early transition metal nitrides

Acta Materialia(2023)

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摘要
Motivated by frequently reported deviations from stoichiometry in cubic transition metal nitride (TMNx) thin films, the effect of N-vacancy concentration on the elastic properties of cubic TiNx, ZrNx, VNx, NbNx, and MoNx (0.72更多
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关键词
TMN,Elastic modulus,Elastic anisotropy,Point defects,Vacancies,Density functional theory,Single crystal,Thin films
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