Towards subvolt and half-mm scale silicon MOS-capacitor MZI modulators

Weiwei Zhang,Arian Hashemi Talkhooncheh,Martin Ebert,Ke Li,Minwo Wang,Bigeng Chen,Graham Reed,Azita Emami,David J. Thomson

2023 IEEE Silicon Photonics Conference (SiPhotonics)（2023）

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摘要

We report the demonstration of sub-mm scale silicon lateral MOS-capacitor MZI modulators operating at > 100 Gb/s PAM-4. The 3D packaged transmitter demonstrates an RF swing of 1.2Vpp and a TDECQ of 1.7 dB for MZI with a total active length of 600 µm.

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关键词

silicon photonics, electro-optic modulators, optical interconnects, integrated optoelectronics

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