Traceable Lumped-Element Calibrations up to 110 GHz on Commercial Calibration Substrates
2023 100th ARFTG Microwave Measurement Conference (ARFTG)(2023)
摘要
In this paper we report for the first time on progress towards establishing traceability for on-wafer measurements of planar devices using fixed-distance 1 umped-element calibrations on a commercially available coplanar calibration substrate. The uncertainty budget includes instrumentation errors, connector repeatability and calibration standard uncertainties. Preliminary results are shown for verification devices embedded in the commercial calibration substrate.
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关键词
on-wafer,calibration,S-parameters,traceability,uncertainty budget
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