Boost in THz mobility in UMG silicon treated by phosphorous diffusion gettering

Sergio Revuelta, Nerea Dasilva, David Fuertes Marrón,Carlos del Cañizo,Enrique Cánovas

Optica Advanced Photonics Congress 2022（2022）

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摘要

By means of Terahertz Spectroscopy we demonstrate a boost in charge carrier mobility in upgraded-metallurgical grade silicon wafers treated by phosphorous diffusion gettering. Mobilities parallel those of high quality poly-Si.

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关键词

umg silicon,thz mobility,phosphorous diffusion

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