Room temperature detection of N2O using a resonant cavity mid-IR detector and interband cascade LED

N. P. Li, L. Tao, J. McSpiritt, M. A. Zondlo, E. M. Jackson, M. Kim,C. S. Kim,C. L. Canedy, C. D. Merritt, W. W. Bewley, J. A. Nolde,E. H. Aifer, I. Vurgaftman, J. R. Meyer

Optical Sensors and Sensing Congress 2022 (AIS, LACSEA, Sensors, ES)（2022）

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摘要

We achieved a detection limit of 400 ppmv N2O (5.5× 10 − 5 absorbance) at 19 °C and 4.0 µm, using emission from an interband cascade light-emitting device (ICLED) in combination with detection by a resonant cavity IR detector (RCID). These results demonstrate the feasibility of combining ICLEDs and RCIDs on a single mass-produced chip for optical gas sensing.

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关键词

temperature detection,n2o,detector,resonant cavity

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