Flexible Wafer-Scale Silicon-Photonics Fabrication Platform

Milica Notaros,Thomas Dyer,Ashton Hattori, Kevin Fealey,Seth Kruger,Jelena Notaros

Frontiers in Optics + Laser Science 2022 (FIO, LS)（2022）

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摘要

We develop a wafer-scale CMOS-compatible platform and fabrication process that results in 300-mm-diameter flexible wafers, and experimentally demonstrate key functionality at visible wavelengths, including chip coupling, waveguide routing, and passive devices.

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