Large Scale Site-Controlled Fabrication of Single Photon Emitters in Silicon Nitride Nanopillars

Samuel Peana,Omer Yesilyurt,Alexander Senichev,Zachariah O. Martin,Vahagn Mkhitaryan,Alexei S. Lagutchev,Alexandra Boltasseva,Vladimir M. Shalaev

Frontiers in Optics + Laser Science 2022 (FIO, LS)（2022）

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摘要

A high yield (67%) method of creating single photon emitters in annealed silicon nitride on silicon oxide pillars is demonstrated. Furthermore, the SPE emitter placement precision is found to be between ±30nm- ±85nm.

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