Development of SOI sensor using simulations based on the effective index method

André L. Moras, Artur A. Silva, Nathan Gonzaga Saraiva, Marcus V. A. Pires,Mario C. M. M. Souza,Luis A. M. Barea,Newton C. Frateschi

Frontiers in Optics + Laser Science 2022 (FIO, LS)（2022）

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摘要

We propose a robust and simple simulation methodology based on the effective index method to estimate the RI sensitivity of a self-referenced PM sensor. Comparison between simulated and experimental results shows accordance higher than 91%.

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关键词

soi sensor,effective index method

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