Telecom C-band photon emission from (In,Ga)As quantum dots generated by filling nanoholes in In0.52Al0.48As layers

We present the fabrication of strain-free quantum dots in the In0.53Ga0.47As/In0.52Al0.48As-system lattice matched to InP, as future sources for single and entangled photons for long-haul fiber-based quantum communication in the optical C-band. We achieved these quantum dots by local droplet etching via InAl droplets in an In0.52Al0.48As layer and subsequent filling of the holes with In0.53Ga0.47As. Here, we present detailed investigations of the hole morphologies measured by atomic force microscopy. Statistical analysis of a set of nanoholes reveals a high degree of symmetry for nearly half of them when etched at optimized temperatures. Overgrowth with 50-150 nm In0.52Al0.48As increases their diameter and elongates the holes along the [011]-direction. By systematically scanning the parameter space, we were able to fill the holes with In0.53Ga0.47As, and by capping the filled holes and performing photoluminescence measurements, we observe photoluminescence emission in the O-band up into the C-band depending on the filling height of the nanoholes.