229 nm far-ultraviolet second harmonic generation in a vertical polarity inverted AlN bilayer channel waveguide

Far-UV light sources have attracted much attention for human-safe viral inactivation and bacterial disinfection. Due to large optical nonlinearity and transparency to this wavelength region, AlN is a promising material for compact and low-cost far-UV second harmonic generation (SHG) devices. In this study, a transverse quasi-phase-matched AlN channel waveguide with vertical polarity inversion was designed and fabricated. From wavelength spectra and a pump power dependence of an SH intensity, far-UV SHG via the largest nonlinear optical tensor component d (33) was successfully confirmed under ultrashort pulse laser excitation.