Theoretical and experimental Investigation on Performance Enhancement Effect for a Novel Capacitive Pressure Sensor with Double-cavity

This study presents the enhanced sensitivity and low temperature drift effect on the performance of a novel double-cavity capacitive pressure sensor for micr-pressure detection. For theoretical analysis, the relative capacitance change of the sensor are formulated by using COMSOL Multiphysics. In experiments, a sensor model is fabricated by 3D printing technology. The obtained result of the sensor having a flexible diaphragm shows the sensitivity is improved by employing additional double-cavity at room temperature. In addition, the temperature drift effect of the designed pressure sensor is measured and examined through comparison with the traditional sensor. The temperature drift effect can be effectively suppressed by adopting the novel structure. It is expected to realize the micro-pressure detection technology which integrates the characteristics of high sensitivity, large linearity range and low temperature drift.