High precision electrostatic inertial sensor

The high precision electrostatic inertial sensor is one of the key technologies used in satellite gravity measurement, space-gravity wave detection, and spacecraft microgravity measurement. This paper presents the basic working principle, provides the noise model, defines the design principle of the main parameters, and expounds on the ground test method of the inertial sensor. The precision structure system is based on the inertial sensor sensitive probe, test mass, and electrode frame and the parameter design of inertial sensor balance distance, bias voltage, carrier voltage, and feedback voltage. It is possible to achieve the performance index of inertial sensor resolution between 10(-8) and 10(-12) m/s(2)/Hz(1/2), which satisfies the range and resolution requirements for inertial sensors in various space missions. Finally, the future development of inertial sensors with higher precision has been discussed.