Well-defined nanostructuring with programmable anodic aluminium oxide template

Abstract Well-defined nanostructuring over size, shape, spatial configuration, and multi-combination is a feasible concept to reach unique properties of nanostructure arrays, while satisfying such broad and stringent requirements with conventional techniques is challenging. Here, we report programmable anodic aluminium oxide templates to address this challenge by achieving well-defined pore features within templates in terms of in-plane and out-of-plane shape, size, spatial configuration, and pore combination. The structural programmability of template pores arises from broad-range anodization voltage adjusting together with uneven aluminium anodization rate designing, and further relies on a systematic blueprint guiding pore diversification. Starting from the programmable templates, we realize a series of nanostructures that inherit equal structural controllability relative to their template counterparts. Proof-of-concept applications based on such nanostructures demonstrate boosted performance. In light of the broad selectivity and high controllability, programmable templates will provide an all-in-one platform for well-defined nanostructuring.