Fabrication of Electronically integrated, mass-manufactured, microscopic robots

Abstract We have developed a fabrication process that can be used to build millions of microscopic, electronically-integrated robots. Our procedure includes steps for building silicon microelectronics, building components for actuation, encapsulation steps, and a process for releasing the robots into aqueous environments. Each step is carried out massively in parallel, allowing us to build over a million robots on a single 4-inch wafer. Broadly, the new actuators and fabrication protocols presented here offer a generic platform and can be used to make a wide range of silicon-based, functional robotic systems that are too small to be resolved by the naked eye.