Significant texture and wear resistance improvement of TiN coatings using pulsed DC magnetron sputtering

N.A. Richter, B. Yang, J.P. Barnard, T. Niu, X. Sheng, D. Shaw, M. Watanabe, G. Rane, U. Krause, P. Dürrenfeld,H. Wang,X. Zhang

Applied Surface Science（2023）

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摘要

•Introduction of pulsed DC power supply promotes (111) texture in TiN films regardless of orientation of Si substrates.•Increasing pulse frequency leads to microstructure refinement and increase in film hardness of TiN films.•Pulsed DC films have an improved wear resistance than conventional DC TiN films as identified through nanoscratch testing.

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关键词

Titanium nitride,Pulse DC magnetron sputtering,Transmission electron microscopy,Nanoscratch testing

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