Selectively enhanced crystal growth of periodically arrayed ZnO nanowires by mist chemical vapor deposition and electron beam lithography

Yudai Inagaki,Yuki Kawai, Tomoya Arimoto, Togi Sasaki, Ayumu Ohashi,Kazuhiko Hara,Tetsuya Kouno

Journal of Crystal Growth(2023)

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摘要
By mist chemical vapor deposition (mist-CVD) and electron beam lithography, the selectively enhanced crystal growth of periodically arrayed ZnO nanowires was demonstrated using arrayed Au thin layers prepared on various commercially available substrates. Mist-CVD is known as a potential low-cost and low-environmentalimpact crystal growth technique. In photoluminescence measurements, periodically arrayed ZnO nanowires exhibited optically pumped lasing action, which may be based on an optical microcavity system of a single ZnO nanowire. The experimental results indicate that integrated microlasers may potentially be realized using such periodically arrayed ZnO nanowires. The significance for engineering is that it is expected to lead to low-cost, low-environmental-impact, and high-performance optical applications.
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关键词
A3,Mist chemical vapor deposition,Selective area crystal growth,B1,Nanomaterials,Zinc compounds,ZnO nanowires,B2,Optical materials,B3,Optical microcavities
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