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Evaluation of Structural and Electrical Properties of Multicomponent Spinel Oxide Thin Films Deposited Via Spray Pyrolysis Technique

MATERIALS CHARACTERIZATION(2023)

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摘要
This work reports the preparation of (Mn,Co,Fe,Ni,Cr)3O4 high-entropy spinel oxide in the form of a - 500 nm thin film utilising a facile spray pyrolysis technique. The structural and electrical properties of the layers were characterised after exposure to temperatures in the range of 400-900 & DEG;C. The as-deposited layers were amorphous, and crystallised upon heat treatment at 500 & DEG;C. Microstructural analyses proved a homogeneous elemental distribution and the desired Fd-3 m cubic spinel structure. Electrical conductivity measurements indicated a dependence on the processing temperature, with the highest electrical conductivity values (-3 S cm-1 at 700 & DEG;C) obtained for layers heat-treated at 700 & DEG;C. The spray pyrolysis technique seems to be well suited to fabricating and exploring spinel-based high-entropy oxides synthesized as thin films, and to studying new compositions containing transition metal cations.
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关键词
Thin films,Deposition,Crystallisation,Grain growth,Spray pyrolysis
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