Fabrication of Au/AAO/Au nanopore arrays based on induced excitation SPPs for the fabrication of nanopores on silicon surfaces

In this paper, a new method for preparing a nanohole surface based on surface plasmon polaritons (SPPs) is proposed. In the proposed method, a layer of gold film is sputtered onto the upper and lower surfaces of porous anodic aluminum oxide (AAO) by ion sputtering to obtain the composite structure of Au/AAO/Au (Metal-Media-Metal, MIM) periodic hole array. The periodic plasma excitation conditions and coupling of the nanohole array are deduced using Maxwell's equations to obtain the locally enhanced surface plasma wave. Afterward, the composite structure is irradiated with a nanosecond laser with a working wavelength of 532 nm to excite the surface plasmon. Simulation results show that Au/AAO/Au (MIM) can excite the surface plasmon under laser induction, and the preparation of nanoholes is realized through experiments. The nanohole array produced by surface plasmon can be used to increase the specific surface area. For some biosensors with special properties, such as microcantilever, enzyme, and other biosensors, a large surface area is required without changing their chemical stability and mechanical strength to increase the detection sensitivity.