Compact model of a metal oxide molecule sensor for self-heating control
Solid-State Electronics(2023)
摘要
•Self-heated molecule sensor made of a SnO2 thin film was developed.•The compact model of the molecule sensor was designed with fitted parameters.•The precise thermal circuit parameters were obtained by the thermal simulation tool.•The sensor’s response to NO2 under various temperatures was measured.•The comparison was shown between the experimental data and the simulation results.
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关键词
Compact model,Molecule sensor,Self-heating,Sensor array,Metal oxide,SPICE
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